Silicon pore optics mirror stacks in cleanroom
![](https://cdn.sci.esa.int/documents/34375/35395/1567216372523-Silicon_pore_optics_mirror_stacks_in_cleanroom_625.jpg)
Date: 19 August 2014
Copyright: cosine Research
Silicon pore optics mirror stacks on the top shelf inside cosine Research's cleanroom facility, awaiting assembly for testing.
The X-ray focusing mirror stacks consist of 35 mirror plates. Each plate is made of a silicon wafer into which parallel grooves have been cut, leaving stiffening ribs and paper-thin mirrors. Their surfaces have been coated with reflective metal. The stacking of the 35 grooved plates results in hundreds of pores on the final mirror stack. The pores allow X-rays incident at grazing angles to propagate through the mirror stack and be reflected on the inner surfaces.
Last Update: 1 September 2019