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Back Silicon pore optics mirror stacks in cleanroom

Silicon pore optics mirror stacks in cleanroom


Date: 19 August 2014
Copyright: cosine Research

Silicon pore optics mirror stacks on the top shelf inside cosine Research's cleanroom facility, awaiting assembly for testing.

The X-ray focusing mirror stacks consist of 35 mirror plates. Each plate is made of a silicon wafer into which parallel grooves have been cut, leaving stiffening ribs and paper-thin mirrors. Their surfaces have been coated with reflective metal. The stacking of the 35 grooved plates results in hundreds of pores on the final mirror stack. The pores allow X-rays incident at grazing angles to propagate through the mirror stack and be reflected on the inner surfaces.

Last Update: 1 September 2019
21-Apr-2026 23:29 UT

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