Silicon pore optics mirror stacks in cleanroom
Silicon pore optics mirror stacks on the top shelf inside cosine Research's cleanroom facility, awaiting assembly for testing.
The X-ray focusing mirror stacks consist of 35 mirror plates. Each plate is made of a silicon wafer into which parallel grooves have been cut, leaving stiffening ribs and paper-thin mirrors. Their surfaces have been coated with reflective metal. The stacking of the 35 grooved plates results in hundreds of pores on the final mirror stack. The pores allow X-rays incident at grazing angles to propagate through the mirror stack and be reflected on the inner surfaces.
Last Update: 1 September 2019